
    0.       1.250   -1.950    0.   
   14.000
   39.000
  0.     0.     0.033  0.     0.066  0.     0.099  0.     0.132  0.     0.164
  0.     0.197  0.     0.230  0.     0.263  0.     0.296  0.     0.329  0.   
  0.362  0.     0.395  0.     0.428  0.     0.461  0.     0.493  0.     0.526
  0.     0.559  0.     0.592  0.     0.625  0.     0.658  0.     0.691  0.   
  0.724  0.     0.757  0.     0.789  0.     0.822  0.     0.855  0.     0.888
  0.     0.921  0.     0.954  0.     0.987  0.     1.020  0.     1.053  0.   
  1.086  0.     1.118  0.     1.151  0.     1.184  0.     1.217  0.     1.250
  0.   
   12.000
  0.    -0.200  0.200 -0.200  0.250 -0.220  0.300 -0.300  0.350 -0.400  0.400
 -0.600  0.850 -0.600  0.900 -0.400  0.950 -0.300  1.000 -0.220  1.050 -0.200
  1.250 -0.200
    6.000
  0.    -0.700  0.300 -0.700  0.300 -1.050  0.950 -1.050  0.950 -0.700  1.250
 -0.700
    2.000
  0.    -1.050  1.250 -1.050
   39.000
  0.    -0.180  0.033 -0.180  0.066 -0.180  0.099 -0.180  0.132 -0.180  0.164
 -0.180  0.197 -0.180  0.230 -0.180  0.263 -0.180  0.296 -0.180  0.329 -0.180
  0.362 -0.180  0.395 -0.180  0.428 -0.180  0.461 -0.180  0.493 -0.180  0.526
 -0.180  0.559 -0.180  0.592 -0.180  0.625 -0.180  0.658 -0.180  0.691 -0.180
  0.724 -0.180  0.757 -0.180  0.789 -0.180  0.822 -0.180  0.855 -0.180  0.888
 -0.180  0.921 -0.180  0.954 -0.180  0.987 -0.180  1.020 -0.180  1.053 -0.180
  1.086 -0.180  1.118 -0.180  1.151 -0.180  1.184 -0.180  1.217 -0.180  1.250
 -0.180
   39.000
  0.    -0.260  0.033 -0.260  0.066 -0.260  0.099 -0.260  0.132 -0.260  0.164
 -0.260  0.197 -0.260  0.230 -0.260  0.263 -0.260  0.296 -0.260  0.329 -0.260
  0.362 -0.260  0.395 -0.260  0.428 -0.260  0.461 -0.260  0.493 -0.260  0.526
 -0.260  0.559 -0.260  0.592 -0.260  0.625 -0.260  0.658 -0.260  0.691 -0.260
  0.724 -0.260  0.757 -0.260  0.789 -0.260  0.822 -0.260  0.855 -0.260  0.888
 -0.260  0.921 -0.260  0.954 -0.260  0.987 -0.260  1.020 -0.260  1.053 -0.260
  1.086 -0.260  1.118 -0.260  1.151 -0.260  1.184 -0.260  1.217 -0.260  1.250
 -0.260
   39.000
  0.    -0.340  0.033 -0.340  0.066 -0.340  0.099 -0.340  0.132 -0.340  0.164
 -0.340  0.197 -0.340  0.230 -0.340  0.263 -0.340  0.296 -0.340  0.329 -0.340
  0.362 -0.340  0.395 -0.340  0.428 -0.340  0.461 -0.340  0.493 -0.340  0.526
 -0.340  0.559 -0.340  0.592 -0.340  0.625 -0.340  0.658 -0.340  0.691 -0.340
  0.724 -0.340  0.757 -0.340  0.789 -0.340  0.822 -0.340  0.855 -0.340  0.888
 -0.340  0.921 -0.340  0.954 -0.340  0.987 -0.340  1.020 -0.340  1.053 -0.340
  1.086 -0.340  1.118 -0.340  1.151 -0.340  1.184 -0.340  1.217 -0.340  1.250
 -0.340
   39.000
  0.    -0.420  0.033 -0.420  0.066 -0.420  0.099 -0.420  0.132 -0.420  0.164
 -0.420  0.197 -0.420  0.230 -0.420  0.263 -0.420  0.296 -0.420  0.329 -0.420
  0.362 -0.420  0.395 -0.420  0.428 -0.420  0.461 -0.420  0.493 -0.420  0.526
 -0.420  0.559 -0.420  0.592 -0.420  0.625 -0.420  0.658 -0.420  0.691 -0.420
  0.724 -0.420  0.757 -0.420  0.789 -0.420  0.822 -0.420  0.855 -0.420  0.888
 -0.420  0.921 -0.420  0.954 -0.420  0.987 -0.420  1.020 -0.420  1.053 -0.420
  1.086 -0.420  1.118 -0.420  1.151 -0.420  1.184 -0.420  1.217 -0.420  1.250
 -0.420
   39.000
  0.    -0.500  0.033 -0.500  0.066 -0.500  0.099 -0.500  0.132 -0.500  0.164
 -0.500  0.197 -0.500  0.230 -0.500  0.263 -0.500  0.296 -0.500  0.329 -0.500
  0.362 -0.500  0.395 -0.500  0.428 -0.500  0.461 -0.500  0.493 -0.500  0.526
 -0.500  0.559 -0.500  0.592 -0.500  0.625 -0.500  0.658 -0.500  0.691 -0.500
  0.724 -0.500  0.757 -0.500  0.789 -0.500  0.822 -0.500  0.855 -0.500  0.888
 -0.500  0.921 -0.500  0.954 -0.500  0.987 -0.500  1.020 -0.500  1.053 -0.500
  1.086 -0.500  1.118 -0.500  1.151 -0.500  1.184 -0.500  1.217 -0.500  1.250
 -0.500
   39.000
  0.    -0.580  0.033 -0.580  0.066 -0.580  0.099 -0.580  0.132 -0.580  0.164
 -0.580  0.197 -0.580  0.230 -0.580  0.263 -0.580  0.296 -0.580  0.329 -0.580
  0.362 -0.580  0.395 -0.580  0.428 -0.580  0.461 -0.580  0.493 -0.580  0.526
 -0.580  0.559 -0.580  0.592 -0.580  0.625 -0.580  0.658 -0.580  0.691 -0.580
  0.724 -0.580  0.757 -0.580  0.789 -0.580  0.822 -0.580  0.855 -0.580  0.888
 -0.580  0.921 -0.580  0.954 -0.580  0.987 -0.580  1.020 -0.580  1.053 -0.580
  1.086 -0.580  1.118 -0.580  1.151 -0.580  1.184 -0.580  1.217 -0.580  1.250
 -0.580
   39.000
  0.    -0.660  0.033 -0.660  0.066 -0.660  0.099 -0.660  0.132 -0.660  0.164
 -0.660  0.197 -0.660  0.230 -0.660  0.263 -0.660  0.296 -0.660  0.329 -0.660
  0.362 -0.660  0.395 -0.660  0.428 -0.660  0.461 -0.660  0.493 -0.660  0.526
 -0.660  0.559 -0.660  0.592 -0.660  0.625 -0.660  0.658 -0.660  0.691 -0.660
  0.724 -0.660  0.757 -0.660  0.789 -0.660  0.822 -0.660  0.855 -0.660  0.888
 -0.660  0.921 -0.660  0.954 -0.660  0.987 -0.660  1.020 -0.660  1.053 -0.660
  1.086 -0.660  1.118 -0.660  1.151 -0.660  1.184 -0.660  1.217 -0.660  1.250
 -0.660
   39.000
  0.    -0.703  0.033 -0.703  0.066 -0.703  0.099 -0.703  0.132 -0.703  0.164
 -0.703  0.197 -0.703  0.230 -0.703  0.263 -0.703  0.295 -0.703  0.319 -0.738
  0.362 -0.740  0.395 -0.740  0.428 -0.740  0.461 -0.740  0.493 -0.740  0.526
 -0.740  0.559 -0.740  0.592 -0.740  0.625 -0.740  0.658 -0.740  0.691 -0.740
  0.724 -0.740  0.757 -0.740  0.789 -0.740  0.822 -0.740  0.855 -0.740  0.888
 -0.740  0.931 -0.738  0.955 -0.703  0.987 -0.703  1.020 -0.703  1.053 -0.703
  1.086 -0.703  1.118 -0.703  1.151 -0.703  1.184 -0.703  1.217 -0.703  1.250
 -0.703
   45.000
  0.    -0.708  0.033 -0.708  0.066 -0.708  0.099 -0.708  0.132 -0.708  0.164
 -0.708  0.197 -0.708  0.230 -0.708  0.263 -0.708  0.292 -0.707  0.295 -0.727
  0.296 -0.765  0.303 -0.790  0.319 -0.815  0.359 -0.820  0.395 -0.820  0.428
 -0.820  0.461 -0.820  0.493 -0.820  0.526 -0.820  0.559 -0.820  0.592 -0.820
  0.625 -0.820  0.658 -0.820  0.691 -0.820  0.724 -0.820  0.757 -0.820  0.789
 -0.820  0.822 -0.820  0.855 -0.820  0.891 -0.820  0.931 -0.815  0.947 -0.790
  0.954 -0.765  0.955 -0.727  0.958 -0.707  0.987 -0.708  1.020 -0.708  1.053
 -0.708  1.086 -0.708  1.118 -0.708  1.151 -0.708  1.184 -0.708  1.217 -0.708
  1.250 -0.708
   51.000
%fillstyle=1
  0.    -0.713  0.033 -0.713  0.066 -0.713  0.099 -0.713  0.132 -0.713  0.164
 -0.713  0.197 -0.713  0.230 -0.713  0.263 -0.713  0.289 -0.711  0.290 -0.728
  0.290 -0.765  0.293 -0.793  0.294 -0.814  0.297 -0.839  0.299 -0.863  0.308
 -0.889  0.352 -0.900  0.395 -0.900  0.428 -0.900  0.461 -0.900  0.493 -0.900
  0.526 -0.900  0.559 -0.900  0.592 -0.900  0.625 -0.900  0.658 -0.900  0.691
 -0.900  0.724 -0.900  0.757 -0.900  0.789 -0.900  0.822 -0.900  0.855 -0.900
  0.898 -0.900  0.942 -0.889  0.951 -0.863  0.953 -0.839  0.956 -0.814  0.957
 -0.793  0.960 -0.765  0.960 -0.728  0.961 -0.711  0.987 -0.713  1.020 -0.713
  1.053 -0.713  1.086 -0.713  1.118 -0.713  1.151 -0.713  1.184 -0.713  1.217
 -0.713  1.250 -0.713
 6
 u.c. berkeley / sample (version: 01may83)
      plasma and ion etching contours profile
  i0=  0.0015  a0=  0.      i3=  0.0001  a3=  0.    
  i1=  0.0015  a1=  0.      i4=  0.      a4=  0.    
  i2=  0.0001  a2=  0.      i5=  0.      a5=  0.    
 contour times:     0.    53.   107.   160.   213. ...
